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Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe
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机译:具有近场光探头的近场光探针,近场光学显微镜,近场光光刻设备和近场光存储设备
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摘要
A near field light probe is capable of emanating a near field light having a sufficient intensity while allowing reduction of aperture size to improve resolution. The near field light probe can be incorporated in a near-field optical microscope, a near field light lithography apparatus, and a near field light storage apparatus. A near field light probe has a configuration in which a light-blocking film is formed with an aperture having slits surrounding the major opening. Light emitted from a light source is coupled into the probe from one side of the light-blocking film, the light being polarized in a predetermined direction with respect to the slits so that a near field light emanates from the major opening.
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