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Method of fabrication of striped magnetoresistive (SMR) and dual stripe magnetoresistive (DSMR) heads with anti-parallel exchange configuration

机译:具有反平行交换配置的条纹磁阻(SMR)和双条纹磁阻(DSMR)磁头的制造方法

摘要

A method for forming a longitudinally magnetically biased dual stripe magnetoresistive (DSMR) sensor element comprises forming a first patterned magnetoresistive (MR) layer. Contact the opposite ends of the patterned magnetoresistive (MR) layer with a first pair of stacks defining a track width of the first magnetoresistive (MR) layer, each of the stacks including a first Anti-Ferro-Magnetic (AFM) layer and a first lead layer. Then anneal the device in the presence of a longitudinal external magnetic field. Next, form a second patterned magnetoresistive (MR) layer above the previous structure. Contact the opposite ends of the second patterned magnetoresistive (MR) layer with a second pair of stacks defining a second track width of the second patterned magnetoresistive (MR) layer. Each of the second pair of stacks includes spacer layer composed of a metal, a Ferro-Magnetic (FM) layer, a second Anti-Ferro-Magnetic (AFM) layer and a second lead layer. Then anneal the device in the presence of a second longitudinal external magnetic field.
机译:一种用于形成纵向磁偏置的双条磁阻(DSMR)传感器元件的方法,包括形成第一图案化的磁阻(MR)层。将图案化的磁阻(MR)层的相对端与定义第一磁阻(MR)层的磁道宽度的第一对堆叠接触,每个堆叠都包括第一反铁磁(AFM)层和第一铅层。然后在存在纵向外部磁场的情况下对设备进行退火。接下来,在先前的结构上方形成第二个图案化的磁阻(MR)层。使第二图案化的磁阻(MR)层的相对端与第二对堆叠接触,从而限定第二图案化的磁阻(MR)层的第二轨道宽度。第二对堆叠中的每对都包括由金属构成的隔离层,铁磁(FM)层,第二反铁磁(AFM)层和第二引线层。然后在第二纵向外部磁场的存在下对设备进行退火。

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