首页> 外国专利> Method for fabrication of field emission devices using carbon nanotube film as a cathode

Method for fabrication of field emission devices using carbon nanotube film as a cathode

机译:使用碳纳米管膜作为阴极的场致发射器件的制造方法

摘要

The present invention relates to field emission deices fabrication using carbon nanotube film as a cathode. The multi-wall carbon nanotubes film possesses low electron field emission and high emission current density, which is deposited by catalytic chemical vapor deposition at low temperature. The carbon nanotubes density can be controlled by tuning of the transition metal catalysts in the seed alloy layer. The film can be deposited onto the substrate uniformly with large area. The present invention is related to the fabrication of cold electron sources, florescent light, vacuum electronic devices, field emission displays and methods of making same.
机译:本发明涉及使用碳纳米管膜作为阴极的场致发射装置的制造。该多壁碳纳米管薄膜具有低的电子场发射和高的发射电流密度,其通过低温下的催化化学气相沉积来沉积。碳纳米管的密度可以通过调节种子合金层中的过渡金属催化剂来控制。该膜可以大面积均匀地沉积在基板上。本发明涉及冷电子源,荧光灯,真空电子器件,场致发射显示器及其制造方法的制造。

著录项

  • 公开/公告号US2002160111A1

    专利类型

  • 公开/公告日2002-10-31

    原文格式PDF

  • 申请/专利权人 SUN YI;SUN ZHUO;

    申请/专利号US20020127296

  • 发明设计人 ZHUO SUN;YI SUN;

    申请日2002-04-22

  • 分类号B05D3/02;C23C16/00;

  • 国家 US

  • 入库时间 2022-08-22 00:51:46

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号