Calibration device for semiconductor testing apparatus, calibration method and semiconductor testing apparatus

摘要

A calibration device for a semiconductor testing apparatus, comprises: an inspection section comprising an inspector for detecting an inspection reference portion provided on a calibration board mounted on the semiconductor testing apparatus; a movement section for moving the inspector to an optional position of an upper surface of the calibration board, and for moving the inspector vertically in the optional position of the upper surface of the calibration board; and a control unit for setting an inspection line passing through the inspection reference portion, for controlling the inspector so as to move the inspector along the set inspection line to detect the inspection reference portion, for determining a center coordinate of the inspection reference portion in accordance with a middle coordinate of a range that the inspection reference portion is detected along the set inspection line, and for compensating a coordinate of a measurement position of the calibration board in accordance with the determined center coordinate in order to precisely contact a probe with the measurement position.