Apparatus and method of collecting substrates abnormally processed or processed previous to ordinary processing

摘要

A second mounting section housing a plurality of substrates abnormally processed in a process section and a plurality of substrates processed previous to ordinary processing therein is provided in addition to a first mounting section housing a plurality of substrates before and after processing. Abnormally processed substrates or previously processed substrates are collected in the second mounting section. Thus, the abnormally processed substrates can be exactly taken out and subjected to inspection and the like, and the substrates processed previous to ordinary processing can be exactly taken out and subjected to inspection and the like.