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Gyroscope and input apparatus using the gyroscope that detects displacement of leg of tuning fork by means of capacitance change when angular velocity is entered
Gyroscope and input apparatus using the gyroscope that detects displacement of leg of tuning fork by means of capacitance change when angular velocity is entered
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机译:陀螺仪及使用该陀螺仪的输入装置,通过输入角速度时的电容变化来检测音叉的腿的位移
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摘要
The invention provides a gyroscope that brings about the miniaturization of a device, improvement of detection sensitivity, and reduction of driving voltage. A gyroscope of the present invention is provided with a tuning fork formed of conductive material having a plurality of legs and a support, a top glass substrate and a bottom glass substrate for holding the tuning fork in-between, a plurality of driving electrodes for driving the plurality of legs in capacitance coupling with the legs, and a plurality of detecting electrodes, each detecting electrode is disposed so as to face to the end face of each leg in the extending direction correspondingly to each leg.
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