首页> 外国专利> Liquid crystal display device having wiring line including first and second layers with second layer having a thickness not greater than 1/2 of a thickness of first layer

Liquid crystal display device having wiring line including first and second layers with second layer having a thickness not greater than 1/2 of a thickness of first layer

机译:具有配线的液晶显示装置,该配线包括第一层和第二层,第二层的厚度不大于第一层的厚度的1/2

摘要

A liquid crystal display device has good contact characteristics between an etched side end portion of a lower layer wiring line and an insulating film and the like, satisfactory step coverage, and satisfactory adhesion to a substrate so that disconnection of an upper layer wiring line and short-circuiting of the lower layer wiring line can be prevented to improve reliability. The liquid crystal display device comprises a wiring line having a laminated structure including a first layer which is made from a first metal layer formed over an insulating substrate and a second layer which is made from a second metal layer different from the first metal layer and is formed over the first metal layer, and the side end face of the first layer has a right-tapered shape with a taper angle of 60° or less, while the side end face of the second layer is approximately perpendicular to or counter-tapered with respect to the insulating substrate. The second layer has a thickness not greater than ½ of that of the first layer.
机译:液晶显示装置在下层布线的蚀刻侧端部与绝缘膜等之间的接触特性良好,台阶覆盖率良好,与基板的密合性良好,因此上层布线的断线和短路成为可能。可以防止下层布线的布线以提高可靠性。液晶显示装置包括具有层叠结构的布线,该布线包括第一层和第二层,该第一层由形成在绝缘基板上的第一金属层制成,该第二层由不同于该第一金属层的第二金属层制成。形成在第一金属层上,并且第一层的侧端面具有右锥度形状,其锥角为60°。当第二层的侧端面大致垂直于绝缘基板或相对于绝缘基板成锥形时,第二层的侧端面小于或等于锥形。第二层的厚度不大于½。第一层的

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