X-ray analysis apparatus with an X-ray detector in the form of a CCD array

摘要

The invention relates to a device for X-ray analysis with energy dispersive detection of fluorescent radiation. In order to enable the measurements to be carried out with a suitable position resolution, the analyzing radiation is conducted to the sample (4) by means of an X-ray conducting capillary (6) which is directed to the sample through the detector surface (14). Practically all fluorescent radiation (30) from the sample can be detected in such arrangement. According to the invention a detector is used in the form of an X-ray-sensitive CCD array (12). Such a CCD array provides a better energy resolution in comparison with conventional EDX detectors. Moreover, for such CCD arrays a large amount of sophisticated software is available for reading out; moreover, such CCDs can be readily purchased, for example, as rejected visible light sensitive arrays in which a small number of pixels have dropped out.