A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20. 展开▼
