Stage apparatus including displacement amplifying mechanism

摘要

A stage apparatus comprises a fixed base, a movable table, a pair of elastic portions arranged in both sides of the table along an X axis, a pair of elastic portions arranged in both sides of the table along a Y axis, a pair of actuators for generating displacements for moving the table in a Y direction, a pair of displacement amplifying mechanisms for amplifying displacements of the actuators, a pair of actuators for generating displacements for moving the table in an X direction, and a pair of displacement amplifying mechanisms for amplifying displacements of the actuators. The displacement amplifying mechanism comprises a support member fixed to the fixed base, a first amplifying arm, a first elastic connecting portion for rotatably connecting the first arm to the support member, a second amplifying arm extending in parallel to the first arm and connected to the elastic portion, a second elastic connecting portion for rotatably connecting the second arm to the support member and connecting members for connecting the first arm to the second arm. The actuator extends toward the first arm across the second arm.