Microelectromechanical systems (MEMS) -type devices having latch release and output mechanisms

摘要

A first embodiment of the invention comprises a miniature release and latch anchor assembly that can be fabricated in combination with other moving and fixed elements on a single substrate (3). Such a release and latch anchor assembly has many applications in MEMS-type devices, particularly devices whose moving elements react in response to predetermined inertial loading inputs externally imposed thereupon. This embodiment provides ways of imposing or enforcing sequential operations of moving parts in a MEMS-type device, a necessary operational requirement for safety and proper arming of projected munitions. A second embodiment of the invention is a variation of the first embodiment wherein a reinsertable-re-releasable latch anchor assembly mechanism has insertable anchor feet members (5) in cooperation with the linchpin member (7) whereby re-latching of the anchor assembly can occur. A third embodiment of the invention comprises various designs of mechanical output pin (25) in various assemblies for relay functioning. These output pin assemblies are part of an integrated or coupled MEMS-type device that mechanically closes or opens an output actuated device such as a valve, electrical contacts or optical transmitting device.