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Process control with control signal derived from metrology of a repetitive critical dimension feature of a test structure on the work piece
Process control with control signal derived from metrology of a repetitive critical dimension feature of a test structure on the work piece
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机译:利用从工件上测试结构的重复临界尺寸特征的度量得出的控制信号进行过程控制
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摘要
A method is provided for manufacturing, the method including processing a workpiece in a processing step, measuring a critical dimension of features formed on the workpiece using a test structure formed on the workpiece, the test structure including a plurality of the features, and forming an output signal corresponding to the critical dimension measurements. The method also includes feeding back a control signal based on the output signal to adjust the processing performed in the processing step if the output signal corresponding to the critical dimension measurements indicates a predetermined tolerance value has been exceeded.
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