Method and device for analysing the three-dimensional distribution of a component in a sample, with radiation generating, imaging, detecting and analysing

摘要

A device for and a method of analysing a sample, comprising: a sample positioning unit for positioning a sample; a radiation generating unit for providing at least one beam of electromagnetic radiation to each of first and second surfaces of the sample; an imaging unit for providing at least one image from radiation transmitted through each of the first and second surfaces of the sample; a detector unit for capturing the images provided by the imaging unit and generating signals corresponding thereto; and an analysing unit for operating on the signals received from the detector unit and generating signals representative of the three-dimensional distribution of at least one component in the sample.