Metal mold for use in nano-imprint lithography, comprises monomolecular non-sticking layer obtained by subjecting mold to reaction with fluoroalkyl compound having mercapto group

摘要

A metal mold comprises a firmly adhering monomolecular non-sticking layer obtained by subjecting the mold to a reaction with a fluoroalkyl compound having a mercapto group. As a result of the reaction, the layer comprises a sulfide of the metal.