CAPACITIVE TRANSDUCER FEEDBACK-CONTROLLED BY MEANS OF ELECTROSTATIC FORCE AND METHOD FOR CONTROLLING THE PROFILE OF THE TRANSDUCING ELEMENT IN THE TRANSDUCER

摘要

The invention is related to a capacitive transducer feedback-controlled by means of electrostatic force and a method forcontrolling said transducer. The transducer comprises a bodypart (8) supporting a dynamically moving transducing elementsensitive to the variable being measured, said transducingelement being, e.g., a diaphragm (9) or a reference mass (36)supported by a bending beam (37), said element further beingat least on its surface electrically conductive to the end offorming a first electrode (9, 36) of the transducer, and thetransducer further comprising at least two second, planarelectrodes (5, 6) which are placed on the same side withregard to the transducing element (9, 37). According to theinvention, the second electrodes (5, 6) have at least essentiallyequal effective areas to the end of measuring the profile of thetransducing element (9, 37) and controlling the same to anexactly defined geometric state.