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Euv, xuv, and x-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions
Euv, xuv, and x-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions
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机译:Euv,xuv和x射线波长源是由液态金属溶液产生的激光等离子体以及溶液中的纳米级颗粒产生的
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摘要
Special liquid droplet targets that are irradiated by a high power laser and are plasmarized to form a point source EUV, XUV and x-ray source. Various types of liquid droplet targets include metallic solutions, and nano-sized particles in solutions having a melting temperature lower than the melting temperature of some or all of the constituent metals, used a laser point source target droplets. The solutions have no damaging debris and can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 0.1 nm to approximately 100 nm, approximately 11.7 nm and 13 nm, approximately 0.5 nm to approximately 1.5 nm, and approximately 2.3 nm to approximately 4.5 nm. The second type of target consists of various types of liquids which contain as a miscible fluid various nano-size particles of different types of metals and non-metal materials.
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