INSPECTION OF A THREE-DIMENSIONAL SURFACE STRUCTURE AND THE CALIBRATION OF ITS RESOLUTION (SOLDER PASTE DEPOSIT) USING A CAMERA, AN OPTICAL SENSOR AND AN INDEPENDENT CALIBRATION MARK

摘要

The invention relates to a device for inspecting a three-dimensional surface structure and to a calibration method using a camera (8) for recording a two-dimensional image and an optical sensor (7) for the three-dimensional measuring of a characteristic to be inspected. The camera (8) and optical sensor (7) are integrated in a sensor unit (6). A calibration mark (16), which is fixed to the inspection device independently of the test specimen (3) is used to calibrate the position and/or resolution of the camera (8) and of the optical sensor (7). This allows a programme-controlled calibration without having to reset the test specimen or inspection device.