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THE METHOD OF FABRICATION OF HIGHLY RESISTIVE GaN BULK CRYSTALS

机译:高电阻氮化镓本体晶体的制备方法

摘要

This method according to the invention allows the fabrication of bulk GaN crystals of high specific resistivity. This is achieved by the crystallization of GaN from the solution of atomic nitrogen in molten mixture of metals, containing gallium and Periodic Table group II metals: magnesium, calcium, zinc, beryllium, cadmium, under high pressure of nitrogen, in the temperature gradient. These crystals can be used to fabrication of excellent single crystalline GaN substrates for deposition of the homoepitaxial layers and structures for the optoelectronic applications.
机译:根据本发明的该方法允许制造高电阻率的块状GaN晶体。这是通过在温度梯度下,在氮气的高压下,从含有氮和元素周期表第II组金属(镁,钙,锌,铍,镉)的熔融金属混合物中原子氮的溶液中GaN结晶来实现的。这些晶体可用于制造出色的单晶GaN衬底,以沉积用于光电子应用的同质外延层和结构。

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