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NITRIDE COMPOUND SEMICONDUCTOR VERTICAL-CAVITY SURFACE-EMITTING LASER

机译:氮化物半导体垂直腔表面激光

摘要

The nitride compound semiconductor vertical-cavity surface-emitting laser of the present invention is characterized in that it includes aperture comprised of a tunnel junction region which is fabricated with a p-type nitride compound semiconductor layer (doping concentration of p-type nitride compound semiconductor layer (doping concentration of p-type dopants: 5x10?18 1x1021) cm-3¿ and a n-type nitride compound semiconductor layer (doping concentration of n-type dopants: 5x10?18 1x1021cm-3¿). In the present invention, a mesa-structured tunnel junction layer that is buried in an eptaxial nitride compound semiconductor layer is used as the current aperture. Therefore, both upper and lower ohmic metal electrodes can be formed on the surface of the n-type nitride compound semiconductor. In this case, current can be uniformly injected over the entire current aperture surface since n-type nitride compound semiconductor has a higher electrical conductivity than p-type nitride compound semiconductor. In summary, the problems in the prior art can be solved by employing tunnel junctions to induce uniform current spreading.
机译:本发明的氮化物化合物半导体垂直腔面发射激光器的特征在于,其包括由隧道结区构成的孔,该隧道结区由p型氮化物化合物半导体层(p型氮化物化合物半导体的掺杂浓度)制成。层(p型掺杂剂的掺杂浓度:5×1​​0 18 18×1102)3 cm-3′和n型氮化物半导体层(n型掺杂剂的掺杂浓度:5×1​​0 18 18×1102102cm-3)。另外,由于将埋入在外延氮化物化合物半导体层中的台面结构的隧道结层用作电流孔,因此能够在n型氮化物化合物半导体的表面上形成上下的欧姆金属电极。在这种情况下,由于n型氮化物化合物半导体的导电率比p型氮化物化合物s的导电率高,因此能够在整个电流开口面均匀地注入电流。半导体。总之,可以通过采用隧道结来引起均匀的电流扩展来解决现有技术中的问题。

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