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Nitride compound semiconductor vertical-cavity surface-emitting laser

机译:氮化物化合物半导体垂直腔面发射激光器

摘要

PURPOSE: A nitride semiconductor vertical-cavity surface-emitting laser is provided to equally inject an electric current at an electric current inputting area by employing a thin p-n tunnel junction layer as the electric current inputting area and by forming a lower ohmic contact layer and an upper ohmic contact layer as n-type nitrides semiconductor layer. CONSTITUTION: An electric current inputting area of a nitride semiconductor vertical-cavity surface-emitting laser is constituted of a tunnel junction area comprising a p-type nitride semiconductor layer and a n-type nitride semiconductor layer. In the p-type nitride semiconductor layer, a p-type dopant having a concentration of 5x10¬18 - 1x10¬21cm¬-3 is doped. In the n-type nitride semiconductor layer, a n-type dopant having a concentration of 5x10¬18 -1x10¬21cm¬-3 is doped. A lower mirror stack(20) and a n-type ohmic contact layer(30) are deposited onto a substrate(10) in sequence. A n-type lower clad layer(40), an activation layer(50), a p-type upper clad layer(60) and a n-type upper ohmic contact layer(80) are deposited onto a central upper surface of the n-type ohmic contact layer(30). The tunnel junction area(70) comprising the p-type nitride semiconductor layer(72) and the n-type nitride semiconductor layer(74) is deposited onto a central upper surface of the p-type upper clad layer(60).
机译:用途:提供氮化物半导体垂直腔面发射激光器,以通过使用薄的pn隧道结层作为电流输入区域并通过形成下部欧姆接触层和半导体层来均匀地在电流输入区域注入电流。上欧姆接触层作为n型氮化物半导体层。组成:氮化物半导体垂直腔表面发射激光器的电流输入区域由隧道结区域组成,该隧道结区域包括p型氮化物半导体层和n型氮化物半导体层。在p型氮化物半导体层中,掺杂浓度为5×10 18〜1×10 10 21cm 3的p型掺杂剂。在n型氮化物半导体层中,掺杂浓度为5×10 18 -1×10 10 21cm 3的n型掺杂剂。下反射镜叠层(20)和n型欧姆接触层(30)依次沉积在衬底(10)上。将n型下覆盖层(40),激活层(50),p型上覆盖层(60)和n型上欧姆接触层(80)沉积在n的中央上表面上。型欧姆接触层(30)。包括p型氮化物半导体层(72)和n型氮化物半导体层(74)的隧道结区域(70)沉积在p型上包层(60)的中央上表面上。

著录项

  • 公开/公告号KR20020041900A

    专利类型

  • 公开/公告日2002-06-05

    原文格式PDF

  • 申请/专利权人 OPTOWELL CO. LTD.;

    申请/专利号KR20000071563

  • 发明设计人 JUN SEONG RAN;YANG GYE MO;

    申请日2000-11-29

  • 分类号H01S5/30;

  • 国家 KR

  • 入库时间 2022-08-22 00:30:55

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