METHODS FOR MANUFACTURE OF SELF-ALIGNED INTEGRALLY GATED NANOFILAMENT FIELD EMITTER CELLS AND ARRAY

摘要

The present invention discloses a new field emitter cell (100) and array consisting of groups of nanofilaments (114) forming emitter cathodes. Control gates are microprocessed to be integrally formed with groups of nanofilament emitter cathodes on a substrate. Groups of nanofilaments are grown directly on the substrate material. As a result, the control gates and groups of nanofilaments are self-aligned with one another.