POROUS SILICON CARBIDE SINTERED COMPACT AND SILICON CARBIDE METAL COMPOSITE SUITABLE FOR USE IN TABLE FOR WAFER POLISHING MACHINE

摘要

A porous silicon carbide sinter having superior thermal uniformity, thermal response, and shape stability. The porous sinter is formed by silicon carbide crystals (21, 22), and the structure formed by the silicon carbide crystals includes opened pores (23). The silicon carbide crystals have an average grain diameter of 20µm or greater, a porosity of 40% or less, and a thermal conductivity of 80W/m·K or more.