A monolithic photonic receiver with self aligned fiber holder suitable for flip chip assembly

摘要

A monolithic photonic receiver device (10) provides an optoelectronic device (14) grown on a front side (16) of a chip (12), a reflective mirror (18) anisotropically etched in a first crystal plane of the chip on a back side (22) opposite the chip front side (16) and a channel anisotropically etched in a second crystal plane on the chip back side such the channel intersects a plane of the etched reflective mirror. Optical coupling between an optical device (30) and the optoelectronic device (14) is accomplished when an optical signal transmitted by the optical device travels along the channel, reflects at the etched surface of the reflective mirror and arrives incident at an active region of the optoelectronic device (14).