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Group III nitride film containing aluminum with hexagonal system crystal structure
Group III nitride film containing aluminum with hexagonal system crystal structure
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机译:包含具有六方晶系晶体结构的铝的III族氮化物膜
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摘要
A III nitride film is directly grown on a crystalline substrate along the C-axis, and includes at least Al element. Then, the III nitride film has hexagonal crystal system, and the lattice constant "c" of the main axis and the lattice constant "a" of the crystal face perpendicular to the main surface satisfies the relation of "C2.363a-3.232".
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