Automatized defect inspection system and defect inspection method

摘要

PURPOSE: An automated defect test apparatus and method is provided to obtain clear images of objects by eliminating shadows caused due to the influence of reflected light and dead angle. CONSTITUTION: An automated defect test apparatus comprises a first illumination device(310) and a second illumination device(320) for radiating light onto an object(340) to be tested; a pick-up unit(330) for receiving the light radiated from the first or second illumination device to the object to be tested, and reflected from the object, and obtaining image for the object; and an image analysis unit for comparing the image of the object obtained by the pick-up unit, with a reference image. The first illumination device includes a light source, and a curved reflecting mirror(313) disposed in such a manner that the light emitted from the light source is reflected toward the direction of the object, and the pick-up unit receives the light reflected from the object to be tested.