METHOD FOR ALIGNING TWO OBJECTS METHOD FOR DETECTING SUPERIMPOSING STATE OF TWO OBJECTS AND APPARATUS FOR ALIGNING TWO OBJECTS

摘要

PURPOSE: To solve the problem that a complicated computing and processing operation must be performed in each object probe and each object pad when a plurality of object probes 8A and their corresponding object pads are aligned. CONSTITUTION: In the alignment method, an object probe 8B and an object pad P are imaged respectively by an upper CCD camera 7A and a lower CCD camera 7B. A probe-tip image 8B and a pad image P are formed in respective image regions on a monitor screen 9A. A gray level due to the brightness is applied to pixels which form the probe-tip image 8B and the pad image P. The probe-tip image 8B is moved to the monitor screen 9A so as to be overlapped with the pad image P. The sum total of brightnesses of all the pixels constituting the pad image is calculated. A position which becomes darkest is judged to be the position in which the object probes 8A are brought most favorably into contact with the object pads.