A Optical Triangulation Displacement Sensors Using a Diffraction Grating

摘要

PURPOSE: An optical triangulation displacement sensor using diffraction grating is provided to average error due to noise of light receiving element. CONSTITUTION: A sensor includes a light source element(100); a condenser lens(200); an imaging lens(300); a penetrating type diffraction grating(400); and a light receiving element(500). The condenser lens receives light from the light source element to transmit to a measured surface(10). The imaging lens receives light reflected by the measured surface. The penetrating type diffraction grating converts the reflected light transmitted by the imaging lens into a plurality of diffraction rays. The light receiving element is where image of the diffraction rays is formed.