cathode structure and its manufacturing method for a CRT using cold cathode electron emission source

摘要

PURPOSE: A method for fabricating a cathode for cathode ray tube using a cold cathode electron emission source and a structure thereof are provided to emit uniformly electrons and improve electric characteristics by forming a catalysis on a substrate in a predetermined interval and growing a carbon nano tube. CONSTITUTION: A thermal oxide layer is formed on an upper face of a base metal(10). The thermal oxide layer is processed by a photo-lithography method and a thermal oxide layer pattern is formed thereby. An etch part(11) and a non-etch part(12) are formed by etching the base metal(10). A metal used as a catalysis is deposited by using a sputtering method and an electron beam deposition method and a catalysis metal layer(31) is formed thereby. The thermal oxide layer pattern is removed by using a BHF(Buffered HydroFluoric) method. The catalysis metal layer(31) is formed uniformly by removing the catalysis metal layer from the thermal oxide layer pattern. A carbon nano tube is formed on the catalysis metal layer(31) by using a thermal CVD(Chemical Vapor Deposition) method.