Method for making of Polymer thin films by low-temperature plasma enhanced chemical vapor deposition using

摘要

PURPOSE: A method for fabricating a copolymer thin film using a low-temperature plasma enhanced chemical vapor deposition(PECVD) method is provided to effectively improve the quality of a surface, by forming a hydrophilic layer necessary for a fog prevention treatment process. CONSTITUTION: A multilayered metal oxide coating material including a hydrophilic material or anti-reflective coating material is formed on a base material. The surface of the base material is activated by plasma generated by non-reactive gas in a vacuum atmosphere. At least one organic compound monomer has a hydrophilic group or forms the hydrophilic group by a plasma polymer reaction. Organic metal compound of at least one kind including an inorganic component is introduced as a gas phase to the inside of a reactor so that the organic metal compound and reactive gas generate plasma caused by electric discharge. An organic/inorganic functional copolymer layer is formed by the generated plasma.