METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE CONTROL METHOD AND CONTROL APPARATUS THEREFOR AND SIMULATION METHOD AND SIMULATION APPARATUS OF MANUFACTURING PROCESS OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: To provide a method of manufacturing a semiconductor device, which conducts semiconductor manufacturing process utilizing a thermochemical reaction in a proper condition, irrespective of the atmospheric conditions. CONSTITUTION: In a specified semiconductor manufacturing process utilizing a thermochemical reaction, the semiconductor manufacturing process is started, based on prescribed process executing initial settings, the condition of the atmosphere in a specified system being in progress of the thermochemical reaction and its change are measured and analyzed at specified time intervals and the analysis result is fed back to the semiconductor manufacturing process.