6 Measurement of 6-degree-of-freedom motions of rigid bodies using a 3-facet mirror

摘要

PURPOSE: An apparatus for measuring micro 6 degree of freedom movement using a reflector is provided, which is not influenced by a mechanical speed limit and thus is appropriate for measuring a high speed movement. CONSTITUTION: According to the apparatus for measuring a micro 6 degree of freedom movement of an object to be measured using a laser beam propagating from a laser beam source, a three sides reflector(110) in a triangular horn shape reflects the laser beam toward three directions by being fixed to the object to be measured. Three position detectors(PSD)(131,132,133) outputs an output signal by measuring a position and the intensity of a laser beam spot focused on a surface of the three sides reflector. And a control part(135) analyzes the 6 degree of freedom of the three sides reflector using the position of the intensity of the laser beam spot being output from three position detectors.