Reusable-component-based SECS communication software composition method

摘要

The present invention of manufacturing a semiconductor to control and manage, a semiconductor manufacturing process in the SECS communication protocol environment consisting of GEM & Application layer, SECS Ⅱ layer and SECS Ⅰ layer to a computer relates to the SECS communication software synthesis method based on the reusable component in the process control method, a semiconductor manufacturing process control procedure to transfer processing after using the operation scenario writer of a graphical editor the form simplified in the GEM & Application layer create a scenario for the control and management in the semiconductor manufacturing process, and; Message generating process of generating Ⅱ SECS messages required for progress of the jobs defined in the scenario created using the graphical form of the SECS message definition Ⅱ builder simplified in the SECS Ⅱ layer and; The SECS Ⅱ message generation process for, such as a SECS Ⅱ perform message transmission and reception processing in the SECS Ⅰ layered graphical editor the operation scenario writer in the form and SECS simplified by sending and receiving messages Ⅱ Message Definition Builder generated by components prefabricated it can easily create a new SECS communication system using the Builder