MONO SOLUTION INCLUDING Ba, Sr AND Ti PRECURSORS FOR MANUFACTURING BST THIN FILM BY MOCOD

摘要

PURPOSE: A mono solution including Ba, Sr AND Ti precursors for manufacturing BST (BaxSr1-xTiO3, where 0x1) thin film by metallic organic chemical vapor deposition (MOCOD) is provided. CONSTITUTION: The mono solution including Ba, Sr AND Ti precursors comprises a solvent selected from the group consisting of pyridine, pyrrole, butylacetate and their mixtures which are used in the production of BST thin film by organometallic chemical vapour deposition; and a mixture of Ba(DPM)2-tetraene, Sr(DPM)2-tetraene and Ti(i-OPr)2(DPM)2 wherein Ba(DPM)2-tetraene, Sr(DPM)2-tetraene and Ti(i-OPr)2(DPM)2 are mixed at a mole ratio of 1 : 1 : 2 to 3 (DPM: 2,2,6,6-tetramethyl-3,5-heptadione, tetraene: tetraethylenepentamine).