Method of fabricating high density fiber reinforced SiC matrix composite by Chemical vapor infiltration process

摘要

The present invention relates to a method for producing a fiber-reinforced silicon carbide matrix composite, the production method of the present invention is a process for making pyrolytic carbon as an intermediate layer by chemical vapor deposition on a fiber reinforcement material, and beta silicon carbide whisker by chemical vapor deposition on the intermediate layer And a step of forming a beta silicon carbide base by chemical vapor deposition. Beta silicon carbide whisker formed by the chemical vapor deposition method reduces the size and volume fraction of the pores of the fiber preform before deposition, and forms a structural skeleton necessary for the growth of the beta silicon carbide matrix to form beta according to the deposition of the reaction gas It facilitates uniform deposition of silicon carbide matrix. Therefore, lower porosity and higher density fiber-reinforced chemical vapor deposition silicon carbide matrix composites are formed through a continuous process of forming beta silicon carbide bases after forming beta silicon carbide whiskers than a single process that forms only beta silicon carbide substrates. There is an effect that can be prepared.