首页> 外国专利> FULLY SELF-ALIGNED BIDIRECTIONAL InGap/GaAs DOUBLE HETEROJUNCTION BIPOLAR TRANSISTOR AND MANUFACTURE METHOD THEREOF

FULLY SELF-ALIGNED BIDIRECTIONAL InGap/GaAs DOUBLE HETEROJUNCTION BIPOLAR TRANSISTOR AND MANUFACTURE METHOD THEREOF

机译:完全自对准双向InGap / GaAs双异质结双极晶体管及其制造方法

摘要

That for operation in the up mode the present invention is fully self-aligned two-way InGap / GaAs double-heterojunction bipolar transistor and a method of manufacturing the same, and more particularly, the one of the element-emitter on-operation by the up mode, and at the same time the collector completely self-aligned two-way InGap / GaAs double-heterojunction bipolar transistor and as it relates to a process for the preparation, in accordance with the full self-alignment bidirectional InGap / GaAs double-heterojunction bipolar transistor and a method of manufacturing the same according to the present invention, that one of the transistor elements emitter-up mode and the collector - because it delivers to operate at the same time as the up mode, the integrated circuit requires it implements high-speed multi-function circuit to select the mode of operation of the transistor element is facilitated according to the design, when the operator to create a transistor obtain the transistor By giving to use a method that selectively etching the respective layers which ensure the reliability of the etching and the planarization process, and at the same time, the lift of the one-manufacturing process and prepared by Cycle because the deposition of each metal in the active area through the off process there are excellent effects that can reduce the time.
机译:对于在向上模式下的操作,本发明是完全自对准的双向InGap / GaAs双异质结双极晶体管及其制造方法,更具体地,是一种通过向上的模式,同时集电极完全按照自对准双向InGap / GaAs双通道完全自对准的双向InGap / GaAs双异质结双极晶体管及其制备工艺根据本发明的异质结双极晶体管及其制造方法,其中,晶体管元件的发射极-上升模式和集电极之一-因为它与上升模式同时工作,所以集成电路需要它实现高速多功能电路选择晶体管元件的工作模式是根据设计方便的,当操作人员创建晶体管时获得晶体管B可以使用一种方法来选择性刻蚀各层,以确保刻蚀和平坦化工艺的可靠性,并同时进行一次制造工艺的提升,并通过循环来制备,因为每种金属都沉积在通过关闭过程中的活动区域,有极好的效果,可以减少时间。

著录项

  • 公开/公告号KR100328148B1

    专利类型

  • 公开/公告日2002-03-12

    原文格式PDF

  • 申请/专利权人 NULL NULL;

    申请/专利号KR19990043612

  • 发明设计人 이준우;김태용;민동욱;정영균;

    申请日1999-10-09

  • 分类号H01L29/737;

  • 国家 KR

  • 入库时间 2022-08-22 00:29:52

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