/ CENTER WAVELENGTH CONTROL METHOD IN WAVELEGTH DIVISION MULTI/DEMULTIPLEXER WITH PLANAR ARRAYED WAVEGUIDE GRATING

摘要

In the present invention groups the wavelength division multiplexer / demultiplexer having a waveguide grating columns, a semiconductor substrate and, formed on the semiconductor substrate and the first process for producing a chip having a waveguide grating with a heat photosensitive; A mask having a predetermined central angle a having an inverted triangle-like slots in the produced chip in the first process and a plane including the second step of irradiating ultraviolet rays on a predetermined portion of the column grid the waveguide through the slot It provides a central wavelength control method for a wavelength division multiplexer / demultiplexer having a waveguide grating heat.