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RESIST PROFILE CALCULATION METHOD AND RESIST PROFILE CALCULATION SYSTEM
RESIST PROFILE CALCULATION METHOD AND RESIST PROFILE CALCULATION SYSTEM
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机译:抗蚀剂轮廓计算方法和抗蚀剂轮廓计算系统
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摘要
The resist shape calculation method and system can shorten the calculation time. The method and system extend the kernel function of the optical system by three times the diffusion length to fill the extended region with zeros, and use the new kernel function obtained from the convolutional integration of the optical kernel function and the Gaussian function. Shape calculation is performed.
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