COMPOUND SWITCHING MATRIX FOR PROBING AND INTERCONNECTING DEVICES UNDER TEST TO MEASUREMENT EQUIPMENT

摘要

The complex switching matrix 30 operates with the resistance measurement system 20 and the laser 22 to quickly and precisely trim the resistance to a predetermined value while the resistance 12 is being measured. The complex switching matrix is implemented with dry relays 34 to 81 and 101 to 164 and includes probe switching matrices 90 to 97 and a configuration matrix 32. The probe switching matrix and the configuration matrix are guarding ) Or reduce the number of average relay contacts required per probe to implement 2-, 3-, and 4-terminal measurements without protection. In addition, the discrete probe switching and measurement configuration matrix effectively isolates the high and low sides of the measurement, thereby reducing the effects of stray resistance and capacitance on the measurement speed and accuracy. Switchable ground configurations 82-89 further improve the accuracy of the measurements. The complex switching matrix of the present invention enables sequential resistance measurements on individual resistors on the array with 2-, 3-, 4-terminal measurement configurations applied to resistors with values ranging from less than 0.1 OMEGA to more than 100 MEGA do.