- DEVEIOPMENT METHOD OF AI-Sn COATING FILM METAL BEARINGS FOR DIESEL ENGINES BY RF MAGNETRON SPUTTERING PROCESS

摘要

The present invention relates to a manufacturing method of a coating film metal bearing for an aluminum (AI) -tin (Sn) -based diesel engine by a magnetron sputtering process,;Magnetron sputtering, one of physical vapor deposition (PVD), is used to form a vacuum in order to improve the linear motion of atoms, molecules, and ions in the vacuum vessel (1) of the apparatus. 2) sputtered aluminum (AI) and tin (Sn) metal targets to which positive argon ( Ar⁺ ) ions are to be deposited by supplying inert argon gas, and the atoms protruding from the targets are radio frequency. (RF) Atoms, molecules, and ions collide by the supply of power,;At this time, the generated electrons are spirally moved by the magnetic field and the average free stroke (the average distance traveled until one molecule moves under vacuum and collides with another) becomes long, causing inelastic collision with other molecules and ionizing with cations. At the same time, atoms and molecules in a vacuum vessel undergo continuous collisions, and atoms are excited or ionized to form a plasma,;At this time, a method of manufacturing an aluminum (AI) -tin (Sn) coating film metal bearing by depositing on the substrate in the state of atoms, molecules or ions of aluminum (AI) and tin (Sn) metal sputtered from the target. As;The base material for manufacturing the coating film bearing is a sintered kemet (2 mm thick) that can compensate for the lubricity even in the local damage of the coating film on a conventional rolled steel ss41 steel, and to improve the adhesion between the material and the coating film Primary cleaning by ultrasonic cleaning of the base material and secondary cleaning by ion bombardment in vacuum vessel.;After cleaning, the coating conditions of the coating film were supplied to a vacuum chamber with a constant argon gas pressure, and maintained at a constant vacuum, so that the aluminum and tin targets were 230w and 55w, respectively, while the argon gas pressure was maintained. The composition ratio of the film produced by applying RF voltage is 75% AI and 25% Sn alloy film, and the coating film is made by the magnetron sputtering method, which is a dry plating method, which was generated by the conventional wet method. There is no fear of discharge of waste liquid and harmful gas,;It is to provide a method of manufacturing a coating film metal bearing for diesel engines by a magnetron sputtering process that can improve pollution and lead resistance, wear resistance, lubricity, durability and corrosion resistance due to lead.