Evaluation of Process Parameters Influence on the Mechanical Properties of RF Magnetron Sputtered TiC Thin-Film Coating

摘要

The mechanical properties of a thin-film coating are very paramount to the development and applications for both research and industrial usages. Enhanced mechanical properties give vast options of applications, curb cost and mitigate the unprecedented failure of materials in services. Optimizing the process parameter is very crucial in developing thin-film coatings mechanical properties. Taguchi was used to develop the experimental matrix using three levels and three factors. Three different sputtering parameters were varied during the experimental process from low to high level. Mechanical characterizations using nanoindentation, nanoscratch and wear tests were performed on the samples to determine the optimal process parameter that yields the best mechanical properties. From Taguchi analysis, the RF power proves to be the most effective control factor in optimizing the hardness and Young's modulus properties with a contribution rate of 70.4% and 84.4%, respectively.