CLEANER FOR USING FITTINGS FOR TRANSFERING CHEMICAL

摘要

The present invention relates to a cleaning device for chemical transport accessories, the device for cleaning a plurality of accessories used for transporting the chemical used in the process for manufacturing a semiconductor device, the chemical or ultrapure water required for cleaning a plurality of accessories Chemical storage tank and ultrapure water storage tank for storing each; A cleaning liquid supply line for supplying chemical or ultrapure water stored in the chemical storage tank and the ultrapure water storage tank to the inlets of the plurality of accessories, respectively, by pumping the pump; First and second valves for opening and closing the supply of the chemical storage tank and the ultrapure water storage tank, respectively; A plurality of third valves each for opening and closing a supply of chemical or ultrapure water supplied to the plurality of accessories; A cleaning liquid discharge line for carrying chemical or ultrapure water discharged from an outlet of the plurality of accessories; It includes a cleaning liquid recovery tank that recovers chemical or ultrapure water carried through the cleaning liquid discharge line, and is used by cleaning only the inside with foreign substances attached to it to remove foreign substances attached to accessories such as chemical transfer valves and pipes. The amount of the cleaning liquid is reduced, thereby reducing the cause of pollution, and the cleaning liquid passes through the interior of the accessory, so that not only the cleaning effect is excellent but also the cleaning time is shortened.