Faraday cage for integrated circuit has lower and upper metallization planes filled with metallization layers and connected at edges by metal ring structures in intermediate planes

摘要

The Faraday cage has an upper and a lower metallization plane (M5, M1) substantially filled with an upper and a lower metallization layer (18,19) and the upper and lower metallization layers are connected at their edges by metal ring structures (20-22) in metallization planes (M2-M4) between the upper and lower metallization planes..