Surface structure analysis method for workpiece sample uses correlation between surface structure data and microscopic image of surface or between different surface images

摘要

The analysis method has surface structure data obtained by scanning the workpiece sample correlated with a microscopic image of the surface structure and/or different microscopic images of the surface structure are correlated with one another. The surface structure data can be obtained by electron back scatter diffraction, with a marking scale (3) provided at the surface of the workpiece for accurate image alignment.