Evacuating device comprises a high vacuum pump for evacuating a second chamber, and a one-stage fore-vacuum pump for evacuating a first chamber and for producing a fore-vacuum for the high vacuum pump

摘要

Device for evacuating a first chamber (1) up to a fore-vacuum and a second chamber (2) up to a high vacuum comprises a high vacuum pump (3) for evacuating the second chamber; and a one-stage fore-vacuum pump for evacuating the first chamber and for producing a fore-vacuum for the high vacuum pump. Preferred Features: The fore-vacuum pump has a first and second suction devices (4a, 4b) for evacuating the first chamber and for producing a fore-vacuum for the high vacuum pump. A first fore-vacuum line (5) having a first valve (6) is arranged between the first suction device and the first chamber and a second fore-vacuum line (7) having a second valve (8) is arranged between the second suction device and the high vacuum pump.