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Work table e.g. for ultra-high vacuum device, has table plate provided as film material covering separating drive from working environment
Work table e.g. for ultra-high vacuum device, has table plate provided as film material covering separating drive from working environment
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机译:工作台例如用于超高真空设备,具有作为薄膜材料的工作台,覆盖驱动器与工作环境的隔离
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摘要
The work table (1) has a table plate (4) provided as a film material covering (5) delimiting a table space (6) enclosing a drive device (7), used for contactless displacement of a working device (3) on the opposite side of the table plate.
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