Device for monitoring a fluid through-flow rate in a fluid pipe has an outlet with a fluid passage channel, a moving element suspended flexibly against a flow of fluid and a detector device for non-contact detection of the element.

摘要

A through-flow device (10) has top (12) and bottom (14) transparent coverings like Pyrex glass coverings that have recesses (12a,14a) on their inner facing sides. Between the coverings there is a layer (16) with a structure formed from a silicon wafer. One recess (14a) for a covering has an impermeable metal coating (18).