Pressure measurement, especially differential pressure measurement between two fluids, in which gluing of support and pressure sensor is used

摘要

Pressure gauge comprises a pressure sensor (108) with a membrane (110) and a sensor-connecting surface. The latter contacts a support substrate (104) surface and the two are glued together using electrically conducting isotropic glue so that contacts (116, 120) of each surface are connected. Anisotropic conducting glue ensures that the membrane is arranged over the pressure opening (106) and that a pressure-tight seal is made between the pressure sensor and the support substrate.