Micromechanical component such as mass flow sensor for internal combustion engines flexes under pressure to give piezoelectric effect

摘要

A micromechanical mass flow sensor comprises a partly clamped tongue (1) which deforms under a change in external pressure. A tension detecting device (2a,b) on the tongue thus detects any change. A micromechanical component, especially a mass flow sensor, comprises a tongue of micromechanical material (1) which is deformed elastically by an external pressure on part of it (11b). There is a tension detecting device (2a,b) on the tongue and a clamp (11a) to hold another part of the tongue. A pressure change alters the mechanical tension at the detector.