Laser microscope and confocal scanning microscope

摘要

A laser microscope includes: a light source that emits deep ultraviolet laser light to be irradiated on a sample; a limiting device that sets a limit to an intensity of the deep ultraviolet laser light irradiated on the sample; a detection device that detects the deep ultraviolet laser light having been reflected from the sample; a storage device that stores first information related to damage to the sample corresponding to the intensity of the deep ultraviolet laser light; and a control device that controls the limiting device based upon the first information when a sample damage limit is input from outside.