Calibration of test cards that form part of a test system for carrying out of wafer tests, using a device that is suitable for calibrating test cards with unsprung contact elements

摘要

Device for calibrating test cards (100') with unsprung contact elements (50') that are used to test semiconductor wafers has: a probe arrangement (200') that has first (KSIG') and second (KSCH') signal contact surfaces; and a positioning device for positioning the probe device on the test card so that first and second signal contact surfaces connect to first and second test card contact elements (50'); whereby the first and second contact surfaces are attached in a sprung manner to the probe arrangement.